High-temperature thermal sensor based on ultra-thin silicon film for ultra-low-power applications

Solid-State Electronics

Volumn 47, Issue 9, 2003, Pages 1553-1558

  Li, Bin ^a   Wu, Z H ^b   Lai, P T ^b   Sin, J K O ^c   Liu, B Y ^a   Zheng, X R ^a  

^a SOUTH CHINA UNIVERSITY OF TECHNOLOGY   (China)

^b UNIVERSITY OF HONG KONG   (Hong Kong)

^c HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

High temperature sensors; Silicon on insulator; Thermal resistor

Indexed keywords

COMPUTER SIMULATION; CURRENT DENSITY; DEGREES OF FREEDOM (MECHANICS); HIGH TEMPERATURE ENGINEERING; RESISTORS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; ULTRATHIN FILMS;

HIGH-FIDELITY SENSORS;

SENSORS;

EID: 0037732738     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(03)00080-7     Document Type: Article

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