Characterisation of zirconium nitride coatings prepared by DC magnetron sputtering

Materials Letters

Volumn 43, Issue 1, 2000, Pages 73-76

  Ramana, J V ^a   Kumar, Sanjiv ^a   David, Christopher ^a   Ray, A K ^b   Raju, V S ^a  

^a Natl Ctr Compositional C   (India)

^b BHABHA ATOMIC RESEARCH CENTRE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

BACKSCATTERING; COATINGS; COMPOSITION; FILMS; MAGNETRON SPUTTERING; MICROHARDNESS; NITROGEN; THICKNESS MEASUREMENT;

PROTON ELASTIC BACKSCATTERING; THICKNESS; ZIRCONIUM NITRIDE;

ZIRCONIUM COMPOUNDS;

EID: 0033891809     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(99)00233-5     Document Type: Article

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