Properties of zirconium oxide thin films deposited by pulsed reactive magnetron sputtering

Surface and Coatings Technology

Volumn 120-121, Issue , 1999, Pages 303-312

  Koski, K ^a,b   Holsa J ^b   Juliet, P ^a  

^a CEA GRENOBLE   (France)

^b UNIVERSITY OF TURKU   (Finland)

Author keywords

Hard coatings; Physical properties; Reactive sputtering; Zirconium oxide

Indexed keywords

COATING; DEPOSIT; FILM; PROPERTIES; SPUTTERING;

EID: 17344389234     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00501-0     Document Type: Conference Paper

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