Ion beam assisted deposition of zirconium nitrides for modulated optical index structures

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 147, Issue 1-4, 1999, Pages 378-382

  Pichon, L ^a   Girardeau, T ^a   Straboni, A ^a   Lignou, F ^a   Perriere J ^b   Frigerio J M ^c  

^a UNIVERSITÉ DE POITIERS   (France)

^b SORBONNE UNIVERSITÉ   (France)

^c CNRS   (France)

Author keywords

Ion beam assisted deposition; Optical coatings; Zirconium nitrides

Indexed keywords

DEPOSITION; ELECTRIC PROPERTIES; NITROGEN; OPTICAL COATINGS; OPTICAL PROPERTIES; STOICHIOMETRY; ZIRCONIUM COMPOUNDS;

ION BEAM ASSISTED DEPOSITION; MODULATED OPTICAL INDEX STRUCTURE; ZIRCONIUM NITRIDE;

ION IMPLANTATION;

EID: 0032734252     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00567-9     Document Type: Article

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