Hybrid sample-inverted reflow and soft-lithography technique for fabrication of conicoid microlens arrays

Applied Optics

Volumn 44, Issue 19, 2005, Pages 4130-4135

  He, Miao ^a   Yuan, Xiaocong ^a   Bu, Jing ^a   Cheong, Wai Chye ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTOMERS; ELECTRON BEAM LITHOGRAPHY; GLASS; PHOTOLITHOGRAPHY; PHOTORESISTS; SILICONES; SOL-GELS; SURFACE ROUGHNESS; ZIRCONIUM COMPOUNDS;

CONICOID MICROLENS ARRAYS; HYBRID SAMPLE-INVERTED REFLOW; HYPERBOLOIDS; SOFT-LITHOGRAPHY;

MICROLENSES;

EID: 22144434057     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.44.004130     Document Type: Article

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