Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si

Optics Express

Volumn 11, Issue 18, 2003, Pages 2244-2252

  De Lima Monteiro, D W ^a   Akhzar Mehr, O ^a   Sarro, P M ^a   Vdovin, G ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; ETCHING; LENSES; LIGHT REFLECTION; LIGHT REFRACTION; MASKS; MICROOPTICS; SILICON;

ABERRATION COMPENSATION; LENS DESIGN; MICROSTRUCTURE FABRICATION; OPTICAL FABRICATION;

OPTICAL SYSTEMS;

EID: 2142669775     PISSN: 10944087     EISSN: None     Source Type: Journal    
DOI: 10.1364/OE.11.002244     Document Type: Article

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