Fabrication of microlens in photosensitive hybrid sol-gel films using a gray scale mask

Materials Science and Engineering C

Volumn 16, Issue 1-2, 2001, Pages 99-102

  Jiang, Hongjin ^a   Yuan, Xiaocong ^a   Yun, Zhisheng ^a   Chan, Yuen Chuen ^a   Lam, Yee Loy ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Diffractive lens; High energy beam sensitive glass gray scale mask; Hybrid sol gel glass; Photosensitive; UV photolithography

Indexed keywords

CHEMICAL AND PHYSICAL PROPERTIES; FILM; MATERIALS; MICROLEN; PHOTOSENSITIVITY; POLYMER; SOL GEL MATRIX; ULTRAVIOLET RADIATION;

HEAT TREATMENT; MASKS; ORGANIC POLYMERS; PHOTOLITHOGRAPHY; PHOTOSENSITIVITY; SOL-GELS; ULTRAVIOLET RADIATION;

DIFFRACTIVE LENSES;

MICROLENSES;

POLYMER;

FILM;

FILM; MATERIALS; MICROLEN; OPTICAL INSTRUMENTATION; PHOTOSENSITIVITY; PHYSICAL CHEMISTRY; SOL GEL MATRIX; ULTRAVIOLET RADIATION;

EID: 0035922723     PISSN: 09284931     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0928-4931(01)00282-X     Document Type: Article

References (13)