Reflow technique for the fabrication of an elliptical microlens array in sol–gel material

Applied Optics

Volumn 42, Issue 36, 2003, Pages 7174-7178

  He, Miao ^a   Yuan, Xiaocong ^a   Ngo, Nam Q ^a   Cheong, Wai C ^a   Bu, Jing ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHARGE COUPLED DEVICES; ETCHING; LASER BEAMS; LIGHT REFRACTION; MICROLENSES; OPTICAL FILMS; PHOTORESISTS; PHOTOSENSITIVITY;

CONFOCAL PLANES; GAUSSIAN BEAMS; REFLOW TECHNIQUE;

SOL-GELS;

EID: 0347568430     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.42.007174     Document Type: Article

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