Sol-gel hybrid glass diffractive elements by direct electron-beam exposure

Electronics Letters

Volumn 34, Issue 5, 1998, Pages 455-456

  Rantala, J T ^a   Nordman, N ^a   Nordman, O ^a   Vahakangas J ^b   Honkanen, S ^a   Peyghambarian, N ^a  

^a UNIVERSITY OF ARIZONA   (United States)

^b VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; ELECTROMAGNETIC WAVE DIFFRACTION; OPTICAL WAVEGUIDES; SOL-GELS;

SOL GEL GLASS FILMS;

OPTICAL GLASS;

EID: 0032485146     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19980368     Document Type: Article

References (8)

1. ANDREWS, M.P., and NAJAFI. S.I., in NAJAFI S.I., and ANDREWS, M.P. (Eds.).: 'Passive and active sol-gel materials and devices'. SPIE vol. CR68, Sol-Gel and Polymer Photonic Devices, 1997, pp.253-285
2. PRESBY, H.M. (Ed.): 'Silica integrated optical circuits'. SPIE Milestone Series, Vol. MS 125, 1996
3. NAJAFI, S.I. (Ed.): 'Introduction to glass integrated optics' (Artech House, Boston, 1992)
4. LI, C.-Y., CHISHAM, J., ANDREWS, M., NAJAFI, S.I., MACKENZIE, J.D., and PEYGHAMBARIAN, N.: 'Sol-gel integrated optical coupler by ultraviolet light imprinting', Electron. Lett., 1995, 31, pp. 271-272
5. SCHMIDT, H., KRUG, H., KASEMANN, R., and TIEFENSEE, F.: 'Development of optical waveguides by sol-gel techniques for laser patterning'. SPIE vol. 1590, Glass Chemistry and Physics, 1991, pp.36-43
6. ITO, T., SAKATA, M., and KOSUGE, M.: ¢novel electron beam resist system convertible into silicate glass', IEICE Trans. Electron., 1993, 76, pp. 588-593
7. 3 films', J. Appl. Phys., 1996, 80, pp. 3683-3686
8. 3 films induced by electron beam', Solid State Commun., 1996, 100, pp. 241-244