Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask

Thin Solid Films

Volumn 352, Issue 1-2, 1999, Pages 9-12

  Ayras P ^a   Rantala, J T ^b   Levy, R ^a   Descour, M R ^a   Honkanen, S ^a   Peyghambarian, N ^a  

^a UNIVERSITY OF ARIZONA   (United States)

^b VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

Glass; Sol gel; Surface structure

Indexed keywords

EID: 0347031713     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00404-6     Document Type: Article

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