Micro-Photonic Systems Utilizing SU-8

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5346, Issue , 2004, Pages 64-72

  Rumpf, Raymond C ^a   Johnson, Eric G ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

Holographic lithography; Micro photonics; Modeling; Optical bench; Passive alignment; Photonic crystals; SU 8

Indexed keywords

COMPUTER SIMULATION; ELECTRONICS PACKAGING; HOLOGRAPHY; LITHOGRAPHY; MAGNETOELECTRIC EFFECTS; OPTICAL FIBERS; OPTICAL SYSTEMS; PHOTONS;

HOLOGRAPHIC LITHOGRAPHY; MICRO-PHOTONICS; OPTICAL BENCHES; PASSICE ALIGNMENT; PHOTONIC CRYSTALS; SU-8;

PHOTORESISTS;

EID: 2142720969     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.533352     Document Type: Conference Paper

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