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Volumn 11, Issue 1, 2003, Pages 27-38

Fabrication and analysis of a three-layer stratified volume diffractive optical element high-efficiency grating

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; HOLOGRAPHY; LIGHT TRANSMISSION; MICROSTRUCTURE; MOIRE FRINGES; PHOTOLITHOGRAPHY;

EID: 2142840242     PISSN: 10944087     EISSN: None     Source Type: Journal    
DOI: 10.1364/OE.11.000027     Document Type: Article
Times cited : (30)

References (10)
  • 1
    • 0032613496 scopus 로고    scopus 로고
    • Stratified volume diffractive optical elements as high-efficiency gratings
    • D.M. Chambers and G.P. Nordin, "Stratified volume diffractive optical elements as high-efficiency gratings," J. Opt. Soc. Am. A 16, 1184-1193, (1999).
    • (1999) J. Opt. Soc. Am. A , vol.16 , pp. 1184-1193
    • Chambers, D.M.1    Nordin, G.P.2
  • 2
    • 0029306568 scopus 로고
    • Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: Enhanced transmittance marix approach
    • M.G. Moharam, D.A. Pommet, E.B. Grann, and T.K. Gaylord, "Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: enhanced transmittance marix approach" J. Opt. Soc. Am. A 12, 1077-1086, (1995).
    • (1995) J. Opt. Soc. Am. A , vol.12 , pp. 1077-1086
    • Moharam, M.G.1    Pommet, D.A.2    Grann, E.B.3    Gaylord, T.K.4
  • 3
    • 0018105217 scopus 로고
    • Theory of alignment monitoring by diffraction from superimposed dual gratings
    • Y. Torii and Y. Mizushima, "Theory of alignment monitoring by diffraction from superimposed dual gratings," J. Opt. Soc. Am. 68, 1716-1731, (1978).
    • (1978) J. Opt. Soc. Am. , vol.68 , pp. 1716-1731
    • Torii, Y.1    Mizushima, Y.2
  • 4
    • 33746045058 scopus 로고
    • Optical ultramicrometer technique utilizing a composite diffraction grating
    • Y. Torii and Y Mizushima, "Optical ultramicrometer technique utilizing a composite diffraction grating," Opt. Commun. 23, 135-138 (1977).
    • (1977) Opt. Commun. , vol.23 , pp. 135-138
    • Torii, Y.1    Mizushima, Y.2
  • 5
  • 6
    • 84956092693 scopus 로고
    • Double diffraction in the Fresnel region
    • K. Kodate, T. Kamiya, and M Kamiyama, "Double diffraction in the Fresnel region," Japl J. of App. Phy. 10, 1040-1045, (1971).
    • (1971) Japl J. of App. Phy. , vol.10 , pp. 1040-1045
    • Kodate, K.1    Kamiya, T.2    Kamiyama, M.3
  • 7
    • 84894021983 scopus 로고
    • Double diffraction of phase gratings in the Fresnel region
    • K. Kodate, T. Kamiya, H. Takenaka, and H., Yanai, "Double diffraction of phase gratings in the Fresnel region," Jap. J. of App. Phy. 14, 1323-1334, (1975).
    • (1975) Jap. J. of App. Phy. , vol.14 , pp. 1323-1334
    • Kodate, K.1    Kamiya, T.2    Takenaka, H.3    Yanai, H.4
  • 8
    • 0033348078 scopus 로고    scopus 로고
    • Alignment and stacking of semiconductor photonic bandgaps by wafer-fusion
    • S. Noda, N Yamamoto, M Imada, H Kobayashi, and Makoto Okano, "Alignment and stacking of semiconductor photonic bandgaps by wafer-fusion," J. of Lightwave Tech. 17, 1948-1955, (1999).
    • (1999) J. of Lightwave Tech. , vol.17 , pp. 1948-1955
    • Noda, S.1    Yamamoto, N.2    Imada, M.3    Kobayashi, H.4    Okano, M.5
  • 10
    • 84894021970 scopus 로고    scopus 로고
    • Personal communication with Melles Griot
    • Personal communication with Melles Griot.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.