A High Sensitive Fabry-Perot Shear Stress Sensor Employing Flexible Membrane and Double SU-8 Structures

Proceedings of IEEE Sensors

Volumn 1, Issue 2, 2002, Pages 969-972

  Tseng, Fan Gang ^a   Lin, Chun Jun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Fabry Perot sensor; Floating element; Flow sensor; Optical fiber sensor; Shear stress sensor

Indexed keywords

COMPUTER SIMULATION; MICROELECTROMECHANICAL DEVICES; OPTICAL FIBERS; SHEAR STRESS; STRESS ANALYSIS; SUBSTRATES; SURFACE ROUGHNESS;

FABRY-PEROT SENSORS; FLOATING ELEMENT; FLOW SENSORS; OPTICAL FIBER SENSORS; SHEAR STRESS SENSORS;

OPTICAL SENSORS;

EID: 1542361315     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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