Optical properties of silicon carbide polytypes below and around bandgap

Thin Solid Films

Volumn 455-456, Issue , 2004, Pages 187-195

  Kildemo, M ^a,b  

^a CERN   (Switzerland)

^b NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Norway)

Author keywords

Anisotropy; Birefringence; Silicon carbide polytypes; Spectroscopic ellipsometry

Indexed keywords

ANISOTROPY; BIREFRINGENCE; CRYSTAL STRUCTURE; ELLIPSOMETRY; LIGHT TRANSMISSION; OSCILLATIONS; SILICON WAFERS; SPECTROSCOPIC ANALYSIS;

BULK MATERIALS; SILICON CARBIDE POLYTYPES; SPECTROSCOPIC ELLIPSOMETRY; WAFER INSPECTION;

SILICON CARBIDE;

EID: 2142697953     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.11.291     Document Type: Conference Paper

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