Ordinary and extraordinary dielectric functions of 4H- and 6H-SiC from 3.5 to 9.0 eV

Applied Physics Letters

Volumn 78, Issue 18, 2001, Pages 2715-2717

  Lindquist, O P A ^a   Jarrendahl K ^a   Peters, S ^b   Zettler, J T ^c   Cobet, C ^c   Esser, N ^c   Aspnes, D E ^d   Henry, A ^a   Edwards, N V ^a,e  

^a LINKÖPING UNIVERSITY   (Sweden)

^b SENTECH INSTRUMENTS GMBH   (Germany)

^c TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^d North Carolina State University   (United States)

^e MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035971903     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1369617     Document Type: Article

References (12)

1. S. Ninomiya and S. Adachi, Jpn. J. Appl. Phys., Part 1 33, 2479 (1994).
2. S. Zollner, J. G. Chen, E. Duda, T. Wetteroth, S. R. Wilson, and J. N. Hilfiker, J. Appl. Phys. 85, 8353 (1999).
3. C. Cobet, K. Wilmers, T. Wethkamp, N. V. Edwards, N. Esser, and W. Richter, Thin Solid Films 364, 111 (2000).
4. S. Logothetidis and J. Petalas, J. Appl. Phys. 80, 1768 (1996).
5. Samples were commercially obtained from ATMI/Epitronics. Qualifying measurements were made with similar samples from Cree Research. No significant differences were observed in analogous spectra.
6. B. Adolph, K. Tenelsen, V. I. Gavrilenko, and F. Bechstedt, Phys. Rev. B 55, 1422 (1997).
7. W. R. L. Lambrecht, S. Limpijumnong, S. N. Rashkeev, and B. Segall, Phys. Status Solidi B 202, 5 (1997).
8. D. E. Aspnes, in Optical Properties of Solids: New Developments, edited by B. O. Seraphin (North-Holland, Amsterdam, 1976), p. 799.
9. The correction was performed for Figs. 3 and 4 only. Stray light effects are very pronounced in the relatively broader 6H spectra; thus they are more readily isolated and corrected in these cases. Corrections to the 4H data are accordingly more complex and will be discussed in more detail elsewhere.
10. D. E. Aspnes, Thin Solid Films 233, 1 (1993), and references therein.
11. N. V. Edwards, K. Järrendahl, K. Robbie, G. Powell, D. E. Aspnes, C. Cobet, N. Esser, W. Richter, and L. D. Madsen, Surf. Sci. Lett. (in print). Here, ~15 Å of surface overlayer were removed in real-time with concentrated Hydrofluoric acid.
12. D. E. Aspnes, Surf. Sci. 135, 286 (1983).