Thickness determination of low doped SiC epi-films on highly doped SiC substrates

Journal of Electronic Materials

Volumn 27, Issue 4, 1998, Pages 300-303

  Macmillan, M F ^a   Henry, A ^b   Janzen E ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b ABB CORPORATE RESEARCH   (Sweden)

Author keywords

Infrared reflectance; Low doping; SiC

Indexed keywords

EID: 0011641368     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-998-0404-9     Document Type: Article

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