Optical properties of SiC investigated by spectroscopic ellipsometry from 3.5 to 10 eV

Thin Solid Films

Volumn 364, Issue 1, 2000, Pages 111-113

  Cobet, C ^a   Wilmers, K ^a,b   Wethkamp, T ^a,b   Edwards, N V ^c   Esser, N ^a   Richter, W ^a  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^b MAX PLANCK INSTITUT FÜR FESTKÖRPERFORSCHUNG   (Germany)

^c LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELLIPSOMETRY; SILICON CARBIDE; SPECTROSCOPIC ANALYSIS; SURFACE ROUGHNESS; THIN FILMS;

DIELECTRIC FUNCTION; SPECTROSCOPIC ELLIPSOMETRY;

DIELECTRIC FILMS;

EID: 0033893808     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00893-7     Document Type: Article

References (16)

1. Morkoc H., Gao G.B., Lin M.E., Sverdlov B., Burns M. J. Appl. Phys. 76:(3):1993;1363.
2. Verma A.R., Krishna P. Polymorphism and Polytypism in Crystals. 1966;Wiley, New York.
3. Lambrecht W.R.L., Limpijumnong S., Rashkeev S.N., Segall B. Phys. Status Solidi B. 202:1997;5.
4. Persson C., Lindefelt U. J. Appl. Phys. 82:(11):1997;5496.
5. Bechstedt F., Käckell P., Zywietz A., et al. Phys. Status Solidi B. 202:1997;35.
6. Choyke W.J. Palik E.D. Handbook of Optical Constants of Solids I. 1985;587 Academic Press, New York.
7. Wheeler B.E. Solid State Commun. 4:1966;173.
8. Logothetidis S., Petalas J. J. Appl. Phys. 80:1996;1768.
9. Petalas J., Logothetidis S., Gioti M., Janowitz C. Phys. Status Solidi B. 209:(2):1998;499.
10. Zollner S., Milifker J.N. Phys. Status Solidi. 1998;submitted for publication.
11. Wethkamp T., Wilmers K., Cobet C., et al. Phys. Rev. B. 59:1999;1845.
12. Azzam R.M.A., Bashara N.B. Ellipsometry and Polarized Light. 1987;North-Holland Personal Library, Amsterdam.
13. Barth J., Johnson R.L., Cardona M. Palik E.D. Handbook of Optical Constants of Solids II. 1991;213 Academic Press.
14. Johnson R.L., Barth J., Cardona M., Fuchs D., Bradshaw A.M. Nucl. Instrum. Methods Phys. Res. A. 290:1990;606.
15. Aspnes D.E., Theeten L.B., Hottier F. Phys. Rev. B. 20:1979;3292.
16. Lambrecht W.R.L., Segall B., Suttrop W., et al. Appl. Phys. Lett. 36:(20):1993;2747.