Dielectric functions of bulk 4H and 6H SiC and spectroscopic ellipsometry studies of thin SiC films on Si

Journal of Applied Physics

Volumn 85, Issue 12, 1999, Pages 8353-8361

  Zollner, Stefan ^a   Chen, J G ^a   Duda, Erika ^a   Wetteroth, T ^a   Wilson, S R ^a   Hilfiker, James N ^b  

^a MOTOROLA INC   (United States)

^b J A WOOLLAM CO INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001069480     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.370682     Document Type: Article

References (51)

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