Investigation of variable incidence angle spectroscopic ellipsometry for determination of below band gap uniaxial dielectric function

Materials Science Forum

Volumn 353-356, Issue , 2001, Pages 417-420

  Kildemo, M ^a   Hunderi, O ^a  

^a NORWEGIAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Norway)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; BIREFRINGENCE; DIELECTRIC PROPERTIES OF SOLIDS; ELLIPSOMETRY; ENERGY GAP; OPTICAL PROPERTIES; THICKNESS MEASUREMENT;

BREWSTER ANGLE; SPECTROSCOPIC ELLIPSOMETRY;

SILICON CARBIDE;

EID: 0035127037     PISSN: 02555476     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.4028/www.scientific.net/msf.353-356.417     Document Type: Article

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