Carrier concentration and lattice absorption in bulk and epitaxial silicon carbide determined using infrared ellipsometry

Physical Review B - Condensed Matter and Materials Physics

Volumn 60, Issue 16, 1999, Pages 11464-11474

  Powell, A ^c   Christiansen, Jim ^b   Gregory, R B ^b   Wetteroth, T ^b   Wilson, S R ^b  

^a UNIVERSITY OF NEBRASKA LINCOLN   (United States)

^b MOTOROLA INC   (United States)

^c ENTEGRIS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000661261     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.60.11464     Document Type: Article

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