Stress evolution in GaAsN alloy films

Journal of Applied Physics

Volumn 97, Issue 10, 2005, Pages

  Reason, M ^a   Weng, X ^a   Ye, W ^a   Dettling, D ^a   Hanson, S ^a   Obeidi, G ^a   Goldman, R S ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALLOY FILMS; NUCLEAR REACTION ANALYSIS (NRA); STRESS EVOLUTION; VEGARD LAW;

LATTICE CONSTANTS; MOLECULAR BEAM EPITAXY; NITRIDES; PARAMETER ESTIMATION; RELAXATION PROCESSES; STRESS ANALYSIS; THIN FILMS; WSI CIRCUITS;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 20944446683     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1900289     Document Type: Article

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