Abrupt model interface for the 4H(1000)SiC-SiO2 interface

Microelectronic Engineering

Volumn 80, Issue SUPPL., 2005, Pages 38-41

  Devynck, Fabien ^a   Giustino, Feliciano ^a   Pasquarello, Alfredo ^a  

^a NONE

Author keywords

Abrupt interface model; SiC SiO2 interface

Indexed keywords

CHEMICAL BONDS; COMPUTER SIMULATION; CRYSTALLINE MATERIALS; INTERFACES (MATERIALS); MATHEMATICAL MODELS; MOLECULAR DYNAMICS; RELAXATION PROCESSES; SILICA; SILICON CARBIDE;

ABRUPT INTERFACE MODELS; BOND DENSITY; CRYSTALLINE SUBSTRATES; SIC-SIO2 INTERFACE;

MOS DEVICES;

EID: 19844364631     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2005.04.021     Document Type: Conference Paper

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