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Applied Physics A: Materials Science and Processing

Volumn 81, Issue 2, 2005, Pages 405-411

Structure and properties of zirconium oxide thin films prepared by filtered cathodic vacuum arc

(3) Yu, G Q a Tay, B K a Zhao, Z W a

a NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; CHEMICAL VAPOR DEPOSITION; COMPOSITION; ION BEAM ASSISTED DEPOSITION; IONIZATION; MORPHOLOGY; OPTICAL PROPERTIES; OXIDATION; SYNTHESIS (CHEMICAL); VACUUM; ZIRCONIA;

FILM MORPHOLOGY; FILM STRUCTURE; FILTERED CATHODIC VACUUM ARC (FCVA); OPTICAL BAND GAP;

THIN FILMS;

EID: 18844442853 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s00339-004-2602-5 Document Type: Article

Times cited : (26)

References (57)

1
- 0031190610
- T. Koch, P. Ziemann: Thin Solid Films 303, 122 (1997)
- (1997) Thin Solid Films , vol.303 , pp. 122
- Koch, T.¹ Ziemann, P.²

2
- 0019316080
- W.H. Lodermilk, D. Milam, F. Rainer: Thin Solid Films 73, 155 (1980)
- (1980) Thin Solid Films , vol.73 , pp. 155
- Lodermilk, W.H.¹ Milam, D.² Rainer, F.³

3
- 0020543402
- P.J. Martin, H.A. Macleod, R.P. Netterfieid, C.G. Pacey, W.G. Sainty: Appl. Opt. 22, 178 (1983)
- (1983) Appl. Opt. , vol.22 , pp. 178
- Martin, P.J.¹ Macleod, H.A.² Netterfieid, R.P.³ Pacey, C.G.⁴ Sainty, W.G.⁵

4
- 0037250104
- B.O. Cho, J.P. Chang, J.H. Min, S.H. Moon, Y.W. Kim: J. Appl. Phys. 93, 745 (2003)
- (2003) J. Appl. Phys. , vol.93 , pp. 745
- Cho, B.O.¹ Chang, J.P.² Min, J.H.³ Moon, S.H.⁴ Kim, Y.W.⁵

5
- 0035872897
- G.D. Wilk, R.M. Wallace, J.M. Anthony: J. Appl. Phys. 89, 5243 (2001)
- (2001) J. Appl. Phys. , vol.89 , pp. 5243
- Wilk, G.D.¹ Wallace, R.M.² Anthony, J.M.³

6
- 0000020022
- M. Copel, M. Gribelyuk, E. Gusev: Appl. Phys. Lett. 76, 436 (2000)
- (2000) Appl. Phys. Lett. , vol.76 , pp. 436
- Copel, M.¹ Gribelyuk, M.² Gusev, E.³

7
- 84875017876
- K.C. Fancey, A. Matthews: J. Vac. Sci. Technol. A 4, 2656 (1986)
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 2656
- Fancey, K.C.¹ Matthews, A.²

8
- 0001527594
- A.S. Kao, G.L. Gorman: J. Appl. Phys. 67, 3826 (1990)
- (1990) J. Appl. Phys. , vol.67 , pp. 3826
- Kao, A.S.¹ Gorman, G.L.²

9
- 0001157983
- F. Jones: J. Vac. Sci. Technol. A 6, 3088 (1988)
- (1988) J. Vac. Sci. Technol. A , vol.6 , pp. 3088
- Jones, F.¹

10
- 18644382595
- S. Venkataraj, O. Kappertz, H. Weis, R. Drese, R. Jayavel, M. Wuttig: J. Appl. Phys. 92, 3599 (2002)
- (2002) J. Appl. Phys. , vol.92 , pp. 3599
- Venkataraj, S.¹ Kappertz, O.² Weis, H.³ Drese, R.⁴ Jayavel, R.⁵ Wuttig, M.⁶

11
- 0034830422
- P. Gao, L.J. Meng, M.P. dos Santos, V. Teixeira, M. Andritschky: Appl. Surf. Sci. 173, 84 (2001)
- (2001) Appl. Surf. Sci. , vol.173 , pp. 84
- Gao, P.¹ Meng, L.J.² Dos Santos, M.P.³ Teixeira, V.⁴ Andritschky, M.⁵

12
- 0001121680
- M.H. Suhail, G. Mohan Rao, S. Mohan: J. Vac. Sci. Technol. A 9, 2675 (1991)
- (1991) J. Vac. Sci. Technol. A , vol.9 , pp. 2675
- Suhail, M.H.¹ Rao, G.M.² Mohan, S.³

13
- 0038161353
- M.S. Wong, W.J. Chia, P. Yashar, J.M. Schneider, W.D. Sproul, S.A. Barnett: Surf. Coat. Technol. 86-87, 381 (1996)
- (1996) Surf. Coat. Technol. , vol.86-87 , pp. 381
- Wong, M.S.¹ Chia, W.J.² Yashar, P.³ Schneider, J.M.⁴ Sproul, W.D.⁵ Barnett, S.A.⁶

14
- 21144466082
- E.E. Khawaja, F. Bouamrane, A.B. Hallak, M.A. Daous, M.A. Salim: J. Vac. Sci. Technol. A 11, 580 (1993)
- (1993) J. Vac. Sci. Technol. A , vol.11 , pp. 580
- Khawaja, E.E.¹ Bouamrane, F.² Hallak, A.B.³ Daous, M.A.⁴ Salim, M.A.⁵

15
- 0009281956
- R. Rujkorakarn, J.R. Sites: J. Vac. Sci. Technol. A 4, 568 (1986)
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 568
- Rujkorakarn, R.¹ Sites, J.R.²

16
- 0041916129
- P.J. Martin, R.P. Netterfield, W.G. Sainty, C.G. Pacey: J. Vac. Sci. Technol. A 2, 341 (1984)
- (1984) J. Vac. Sci. Technol. A , vol.2 , pp. 341
- Martin, P.J.¹ Netterfield, R.P.² Sainty, W.G.³ Pacey, C.G.⁴

17
- 0000392474
- M.G. Krishna, K.N. Rao, S. Mohan: Appl. Phys. Lett. 57, 557 (1990)
- (1990) Appl. Phys. Lett. , vol.57 , pp. 557
- Krishna, M.G.¹ Rao, K.N.² Mohan, S.³

18
- 36449001611
- M. Bellotto, A. Candi, E. Cereda, G. Gabetta, M. Scagliotti, G.M. Braga Marcazzan: Appl. Phys. Lett. 63, 2056 (1993)
- (1993) Appl. Phys. Lett. , vol.63 , pp. 2056
- Bellotto, M.¹ Candi, A.² Cereda, E.³ Gabetta, G.⁴ Scagliotti, M.⁵ Marcazzan, G.M.B.⁶

19
- 0347102923
- A.S. Kao: J. Appl. Phys. 69, 3309 (1991)
- (1991) J. Appl. Phys. , vol.69 , pp. 3309
- Kao, A.S.¹

20
- 0001140673
- M. Matsuoka, S. Isotani, S. Miyake, Y. Setsuhara, K. Ogata, N. Kuratani: J. Appl. Phys. 80, 1177 (1996)
- (1996) J. Appl. Phys. , vol.80 , pp. 1177
- Matsuoka, M.¹ Isotani, S.² Miyake, S.³ Setsuhara, Y.⁴ Ogata, K.⁵ Kuratani, N.⁶

21
- 0000156996
- M. Matsuoka, S. Isotani, J.F.D. Chubaci, S. Miyake, Y. Setsuhara, K. Ogata, N. Kuratani: J. Appl. Phys. 88, 3773 (2000)
- (2000) J. Appl. Phys. , vol.88 , pp. 3773
- Matsuoka, M.¹ Isotani, S.² Chubaci, J.F.D.³ Miyake, S.⁴ Setsuhara, Y.⁵ Ogata, K.⁶ Kuratani, N.⁷

22
- 36549092585
- M. Monta, H. Fukumoto, T. Imura, Y. Osaka, M. Ichihara: J. Appl. Phys. 58, 2407 (1985)
- (1985) J. Appl. Phys. , vol.58 , pp. 2407
- Monta, M.¹ Fukumoto, H.² Imura, T.³ Osaka, Y.⁴ Ichihara, M.⁵

23
- 0001313277
- P.J. Martin, R.P. Netterfield, W.G. Sainty, G.J. Clark, W.A. Lanford, S.H. Sie: Appl. Phys. Lett 43, 711 (1983)
- (1983) Appl. Phys. Lett , vol.43 , pp. 711
- Martin, P.J.¹ Netterfield, R.P.² Sainty, W.G.³ Clark, G.J.⁴ Lanford, W.A.⁵ Sie, S.H.⁶

24
- 0021157148
- P.J. Martin, R.P. Netterfield, W.G. Sainty: J. Appl. Phys. 55, 235 (1984)
- (1984) J. Appl. Phys. , vol.55 , pp. 235
- Martin, P.J.¹ Netterfield, R.P.² Sainty, W.G.³

25
- 0012924581
- X.L. Jiang, N. Xu: J. Appl. Phys. 66, 5594 (1989)
- (1989) J. Appl. Phys. , vol.66 , pp. 5594
- Jiang, X.L.¹ Xu, N.²

26
- 0037012295
- E. De la Rosa-Cruz, L.A. Diaz-Torres, P. Salas, D. Mendoza, J.M. Hernandez, V.M. Castano: Opt. Mat. 19, 195 (2002)
- (2002) Opt. Mat. , vol.19 , pp. 195
- De La Rosa-Cruz, E.¹ Diaz-Torres, L.A.² Salas, P.³ Mendoza, D.⁴ Hernandez, J.M.⁵ Castano, V.M.⁶

27
- 0031643548
- I.G. Brown: Annu. Rev. Mater. Sci. 28, 243 (1998)
- (1998) Annu. Rev. Mater. Sci. , vol.28 , pp. 243
- Brown, I.G.¹

28
- 0035881436
- P.J. Martin, A. Bendavid: Thin Solid Films 394, 1 (2001)
- (2001) Thin Solid Films , vol.394 , pp. 1
- Martin, P.J.¹ Bendavid, A.²

29
- 4043127038
- R.L. Boxman, V. Zhitomirsky, B. Alterkop, E. Gidalevich, I. Beilis, M. Keidar, S. Goldsmith: Surf. Coat. Technol. 86-87, 243 (1996)
- (1996) Surf. Coat. Technol. , vol.86-87 , pp. 243
- Boxman, R.L.¹ Zhitomirsky, V.² Alterkop, B.³ Gidalevich, E.⁴ Beilis, I.⁵ Keidar, M.⁶ Goldsmith, S.⁷

30
- 0001621931
- G.Y. Yushkov, A. Anders, E.M. Oks, I.G. Brown: J. Appl. Phys. 88, 5618 (2000)
- (2000) J. Appl. Phys. , vol.88 , pp. 5618
- Yushkov, G.Y.¹ Anders, A.² Oks, E.M.³ Brown, I.G.⁴

31
- 0004029498
- Noyes, NY
- R.L. Boxman, P.J. Martin, D. Sanders (Eds.), Handbook of Vacuum Arc Science and Technology, (Noyes, NY, 1996)
- (1996) Handbook of Vacuum Arc Science and Technology
- Boxman, R.L.¹ Martin, P.J.² Sanders, D.³

32
- 0000032823
- S. Anders, J. Díaz, J.W. Ager III, R. Yu Lo, D.B. Bogy: Appl. Phys. Lett. 71, 3367 (1997)
- (1997) Appl. Phys. Lett. , vol.71 , pp. 3367
- Anders, S.¹ Díaz, J.² Ager III, J.W.³ Lo, R.Y.⁴ Bogy, D.B.⁵

33
- 22644448879
- O.R. Monteiro: J. Vac. Sci. Technol. B 17, 1094 (1999)
- (1999) J. Vac. Sci. Technol. B , vol.17 , pp. 1094
- Monteiro, O.R.¹

34
- 0038613546
- G.Q. Yu, B.K. Tay, S.P. Lau, K. Prasad, J.X. Gao: J. Phys. D: Appl. Phys. 36, 1355 (2003)
- (2003) J. Phys. D: Appl. Phys. , vol.36 , pp. 1355
- Yu, G.Q.¹ Tay, B.K.² Lau, S.P.³ Prasad, K.⁴ Gao, J.X.⁵

35
- 0037461138
- Z.W. Zhao, B.K. Tay, D. Sheeja: Surf. Coat. Technol. 167, 234 (2003)
- (2003) Surf. Coat. Technol. , vol.167 , pp. 234
- Zhao, Z.W.¹ Tay, B.K.² Sheeja, D.³

36
- 0042531728
- Z.W. Zhao, B.K. Tay, S.P. Lau, C.Y. Xiao: J. Vac. Sci. Technol. A 21, 906 (2003)
- (2003) J. Vac. Sci. Technol. A , vol.21 , pp. 906
- Zhao, Z.W.¹ Tay, B.K.² Lau, S.P.³ Xiao, C.Y.⁴

37
- 0034731780
- X. Shi, B.K. Tay, S.P. Lau: Int. J. Mod. Phys. B 14, 136 (2000)
- (2000) Int. J. Mod. Phys. B , vol.14 , pp. 136
- Shi, X.¹ Tay, B.K.² Lau, S.P.³

38
- 0006847832
- Hard- and Software, Aachen, Germany
- W. Theiss: In: Scout Thin Film Analysis Software Handbook, (Hard- and Software, Aachen, Germany), www.mtheiss.com
- Scout Thin Film Analysis Software Handbook
- Theiss, W.¹

39
- 0038693105
- G.Q. Yu, B.K. Tay, S.P. Lau, K. Prasad, L.K. Pan, J.W. Chai, D. Lai: Chem. Phys. Lett. 373, 264 (2003)
- (2003) Chem. Phys. Lett. , vol.373 , pp. 264
- Yu, G.Q.¹ Tay, B.K.² Lau, S.P.³ Prasad, K.⁴ Pan, L.K.⁵ Chai, J.W.⁶ Lai, D.⁷

40
- 52449149154
- G.P. Abriata, J. Garces, R. Versaci: Bull. Alloy Phase Diag. 7, 116 (1986)
- (1986) Bull. Alloy Phase Diag. , vol.7 , pp. 116
- Abriata, G.P.¹ Garces, J.² Versaci, R.³

41
- 0003427458
- Addison Wesley, Reading. MA
- B.D. Cullity: Elements of X-ray Diffraction (2nd ed., Addison Wesley, Reading. MA 1978) p. 102
- (1978) Elements of X-ray Diffraction (2nd Ed.) , pp. 102
- Cullity, B.D.¹

42
- 0008942212
- ed. by N.S. Mclntyre (Amer. Soc. for Testing Materials, Philadelphia)
- T.L. Barr: In: Quantitative Surface Analysis of Materials, ed. by N.S. Mclntyre (Amer. Soc. for Testing Materials, Philadelphia, 1978) p. 83
- (1978) Quantitative Surface Analysis of Materials , pp. 83
- Barr, T.L.¹

43
- 0000050992
- D. Majumdar, D. Chatterjee: J. Appl. Phys. 70, 988 (1991)
- (1991) J. Appl. Phys. , vol.70 , pp. 988
- Majumdar, D.¹ Chatterjee, D.²

44
- 0016903560
- T.L. Barr: J. Vac. Sci. Technol. 14, 660 (1977)
- (1977) J. Vac. Sci. Technol. , vol.14 , pp. 660
- Barr, T.L.¹

45
- 0000856582
- C. Morant, J.M. Sanz, L. Galan, L. Soriano, F. Rueda: Surf. Sci. 218, 331 (1989)
- (1989) Surf. Sci. , vol.218 , pp. 331
- Morant, C.¹ Sanz, J.M.² Galan, L.³ Soriano, L.⁴ Rueda, F.⁵

46
- 0013121427
- X. Wang, X.H. Liu, S.C. Zou, P.J. Martin, A. Bendavid: J. Appl. Phys. 80, 2658 (1996)
- (1996) J. Appl. Phys. , vol.80 , pp. 2658
- Wang, X.¹ Liu, X.H.² Zou, S.C.³ Martin, P.J.⁴ Bendavid, A.⁵

47
- 0344890302
- F. Abeles (Ed.) (North-Holland, Amsterdam)
- J. Taue: In: F. Abeles (Ed.) Optical Properties of Solids (North-Holland, Amsterdam 1971), p. 71
- (1971) Optical Properties of Solids , pp. 71
- Taue, J.¹

48
- 0001476060
- J.G. Bendoraitis, R.E. Salomon: J. Phys. Chem. 69, 3666 (1965)
- (1965) J. Phys. Chem. , vol.69 , pp. 3666
- Bendoraitis, J.G.¹ Salomon, R.E.²

49
- 0001853394
- I. Kosacki, V. Petrovsky, H.U. Anderson: Appl. Phys. Lett 74, 341 (1999)
- (1999) Appl. Phys. Lett , vol.74 , pp. 341
- Kosacki, I.¹ Petrovsky, V.² Anderson, H.U.³

50
- 0001092233
- N. Nicoloso, A. Löbert, B. Leibold: Sens. Actuators B 8, 253 (1992)
- (1992) Sens. Actuators B , vol.8 , pp. 253
- Nicoloso, N.¹ Löbert, A.² Leibold, B.³

51
- 0026707169
- M. Ghanashyam Krishna, K. Narasimha Rao, S. Mohan: Thin Solid Films 207, 248 (1992)
- (1992) Thin Solid Films , vol.207 , pp. 248
- Krishna, M.G.¹ Rao, K.N.² Mohan, S.³

52
- 0343197953
- P. Sigmud: J. Appl. Phys. 50, 7261 (1979)
- (1979) J. Appl. Phys. , vol.50 , pp. 7261
- Sigmud, P.¹

53
- 0019612734
- K. Meyer, I .K. Schuller, C.M. Falco: J. Appl. Phys. 52, 5803 (1981)
- (1981) J. Appl. Phys. , vol.52 , pp. 5803
- Meyer, K.¹ Schuller, I.K.² Falco, C.M.³

54
- 0037091861
- A. Anders, G.Y. Yushkov: J. Appl. Phys. 91, 4824 (2002)
- (2002) J. Appl. Phys. , vol.91 , pp. 4824
- Anders, A.¹ Yushkov, G.Y.²

55
- 0001481239
- M.M.M. Bilek, P.J. Martin, D.R. McKenzie: J. Appl. Phys. 83, 2965 (1998)
- (1998) J. Appl. Phys. , vol.83 , pp. 2965
- Bilek, M.M.M.¹ Martin, P.J.² McKenzie, D.R.³

56
- 0013364398
- R. Messier, A.P. Giri, R.A. Roy: J. Vac. Sci. Technol. A 2, 500 (1984)
- (1984) J. Vac. Sci. Technol. A , vol.2 , pp. 500
- Messier, R.¹ Giri, A.P.² Roy, R.A.³

57
- 84953682805
- J.A. Thornton: J. Vac. Sci. Technol. A 4 3059 (1986)
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 3059
- Thornton, J.A.¹

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