High-rate reactive d.c. magnetron sputtering of ZrOx coatings

Surface and Coatings Technology

Volumn 86-87, Issue PART 1, 1996, Pages 381-387

  Wong, M S ^a   Chia, W J ^a   Yashar, P ^b   Schneider, J M ^a   Sproul, W D ^a   Barnett, S A ^b  

^a BIRL   (United States)

^b Northwestern University   (United States)

Author keywords

D.c. Sputtering; Oxide; Reactive sputtering; Zirconia

Indexed keywords

COATING TECHNIQUES; DEPOSITION; HARDNESS; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; OXIDES; PHASE COMPOSITION; PHASE TRANSITIONS; STRUCTURE (COMPOSITION); SYNTHESIS (CHEMICAL); TEXTURES; ZIRCONIA;

ARGON OXYGEN GAS MIXTURES; REACTIVE SPUTTERING; ZIRCONIA COATINGS;

PROTECTIVE COATINGS;

EID: 0038161353     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)03038-1     Document Type: Article

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