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Thin Solid Films

Volumn 303, Issue 1-2, 1997, Pages 122-127

Effects of ion-beam-assisted deposition on the growth of zirconia films

(2) Koch, Thomas a Ziemann, Paul b

a Optikzentrum NRW (Germany)

b UNIVERSITY OF ULM (Germany)

Author keywords

Auger electron spectroscopy (AES); Electron energy loss spectroscopy (EELS); Ion bombardment; Sputtering

Indexed keywords

CRYSTAL LATTICES; FILM GROWTH; ION BEAMS; ION BOMBARDMENT; OXYGEN; SEMICONDUCTING SILICON; SPUTTER DEPOSITION; STOICHIOMETRY; THIN FILMS; X RAY CRYSTALLOGRAPHY; YTTRIUM; ZIRCONIA;

ION BEAM ASSISTED DEPOSITION (IBAD);

SEMICONDUCTING FILMS;

EID: 0031190610 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)00040-0 Document Type: Article

Times cited : (33)

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