Release processing effects on laser repair of stiction-failed microcantilevers

Journal of Microelectromechanical Systems

Volumn 14, Issue 2, 2005, Pages 410-418

  Koppaka, Sai B ^a   Phinney, Leslie M ^a,b  

^a United States of America   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Adhesion; Laser repair; Microcantilever; Microelectromechanical systems (MEMS); Release; Stiction

Indexed keywords

ADHESION; LASER BEAM EFFECTS; MATHEMATICAL MODELS; MICROMACHINING; NEODYMIUM LASERS; POLYSILICON; STICTION;

ISOPROPYL ALCOHOL; LASER REPAIR; MICROCANTILEVER;

MICROELECTROMECHANICAL DEVICES;

EID: 18844429461     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.839344     Document Type: Article

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