Temperature response of silicon MEMS cantilevers during and after Nd:YAG laser irradiation

Numerical Heat Transfer; Part A: Applications

Volumn 45, Issue 8, 2004, Pages 737-750

  Rogers, James W ^a,b   Phinney, Leslie M ^a,c  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b MURRAY STATE UNIVERSITY   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY TRANSFER; LASER BEAM EFFECTS; MICROELECTROMECHANICAL DEVICES; NEODYMIUM LASERS; POLYCRYSTALLINE MATERIALS; SENSORS; SILICON;

FOURIER NUMBER; MICROCANTILEVERS; PULSE DURATION; TEMPERATURE SENSORS;

HEAT CONVECTION;

EID: 2542473197     PISSN: 10407782     EISSN: None     Source Type: Journal    
DOI: 10.1080/10407780490440110     Document Type: Article

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