Atomic structure of B-related defects and B diffusion in Si predoped with P impurities

Physical Review B - Condensed Matter and Materials Physics

Volumn 69, Issue 8, 2004, Pages

  Moon, Chang Youn ^a   Kim, Yong Sung ^a   Chang, K J ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; PHOSPHORUS; SILICON;

ARTICLE; ATOM; CALCULATION; DIELECTRIC CONSTANT; DIFFUSION; ELECTRIC POTENTIAL; ENERGY TRANSFER;

EID: 1842564083     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.69.085208     Document Type: Article

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