An investigation on technologies to fabricate microcoils for miniaturized actuator systems

Microsystem Technologies

Volumn 10, Issue 3, 2004, Pages 175-181

  Kohlmeier, T ^a   Seidemann, V ^b   Buttgenbach S ^b   Gatzen, H H ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

^b TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

Electromagnetic actuators; Linear motors; MEMS; Microcoils; UV depth lithography

Indexed keywords

ASPECT RATIO; EMBEDDED SYSTEMS; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING;

ELECTROMAGNETIC MICROACTUATORS; MICROCOILS; ULTRAVIOLET DEPTH LITHOGRAPHY;

MICROACTUATORS;

EID: 1842479814     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-003-0362-3     Document Type: Article

References (38)

1. Acosta RE et al. (1995) Integrated variable reluctance magnetic mini-motor. Electrochem Soc Procs 95 (18): 508-520
2. Ahn CH et al. (1993) Planar variable reluctance magnetic micromotor with fully integrated stator and coils. IEEE J Microelectromech Sys 2 (4): 165-173
3. Becker EW et al. (1986) Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming and plastic moulding (LIGA process). Microelectronic Eng 4: 35-56
4. Chang HK; Kim YK (2000) UV-LIGA process for high aspect ratio structure using stress barrier and C-shaped etch hole. Sensors and Actuators A 84: 342-350
5. Conédéra V et al. (1999) Potentialities of a new positive photoresist for the realization of thick moulds. J Micromech Microeng 9: 173-175
6. Föhse M et al. (2001) Thinfilm technologies to fabricate a linear microactuator. Sensors and Actuators A 91: 145-149
7. Föhse M; Gatzen HH (2002) Optimizing the magnetic properties of electroplated permalloy for flux guides in micromotors. Proc. Seventh International Symposium on Magnetic Materials, Processes and Devices, 202nd Meeting of The Electrochemical Society, Salt Lake City, UT, USA (accepted)
8. Fullin E et al. (1998) A new basic technology for magnetic microactuators. Proc 12 Annual International Workshop on Micro Electro Mechanical Systems, 25-29. January, pp 143-147
9. Gatzen HH et al. (2000) A novel variable reluctance micromotor for linear actuation. Proc 7th international conference on new actuators, Actuator 2000, Bremen, Germany, June 19-21, pp. 363-366
10. Gatzen HH et al. (2003) An electromagnetically actuated bi-stable MEMS optical microswitch. Proc 12th international conference on solid-state sensors, Actuators and Microsystems, Transducers '03, Boston, MA, USA, June 8-12 (accepted for publication)
11. Guckel H et al. (1993) Design and testing of planar magnetic micromotors fabricated by deep X-ray lithography and electroplating. Proc Transducers '93, Yokohama, Japan, pp 76-79
12. Guckel H et al. (1996) Electromagnetic linear actuators with inductive position sensing. Sensors and Actuators A: 386-391
13. Guérin LJ et al. High aspect ratio planar coils embedded in SU8 photoepoxy for MEMS applications. Proc 12th European conference on solid-state transducers and the 9th UK conference on sensors and their applications, Eurosensors XII, Bristol , UK, September 13-16, pp 11-14
14. LaBianca N; Gelorme JD (1995) High aspect ratio resist for thick film applications. Proc SPIE 2438: 846-849
15. LaBianca NC et al. (1995) High aspect ratio optical resist chemistry for MEMS applications. Electrochem Soc Procs 95-18: 386-396
16. Lee KY et al. (1995) Micromachining applications of a high resolution ultrathick photoresist. J Vac Sci Technol B 13: 3012-3016
17. Löchel B et al. (1995) Micro coils fabricated by UV depth lithography and galvanoplating. Proc 8th international conference on solid-state sensors and actuators, and Eurosensors IX, Transducers '95, Stockholm, June 25-29, pp 264-267
18. Loechel B (2000) Thick-layer resists for surface micromachining. J Micromech Microeng 10: 108-115
19. Lorenz H et al. (1997) SU-8: A low-cost negative resist for MEMS. J Micromech Microeng 7: 121-124
20. Lorenz H et al. (1998) High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS. Sensors and Actuators A 70: 33-39
21. Kohlmeier T et al. (2002a) Application of UV depth lithography and 3D-microforming for high aspect ratio electromagnetic microactuator components. Microsys Technol 8: 304-307
22. Kohlmeier T et al. (2002b) Electromagnetic bearing systems for integration in a linear microactuator. Proc Eurosensors XVI, 16th European conference on solid-state transducers, Prague, Czech Republic, pp 1217-1220
23. Kohlmeier T; Gatzen HH (2002) Challenges in using photosensitive embedding material to planarize multilayer coils for actuator systems. J Magnetism and Magnetic Materials 242-245: 1149-1152
24. Kourouklis C. et al. (2002) The application of chemical-mechanical polishing for planarizing a SU-8/ permalloy combination used in MEMS devices. Proc EMSA 2002, Athens, Greece (in press)
25. Ohnstein TR (1996) Tunable IR filters with integral electromagnetic actuators. Solid State Sensors and Actuator Workshop, Hilton Head, South Carolina, June 2-6, pp 196-199
26. Ohnmacht M et al. (2000) Microcoils and microrelays - an optimized multilayer fabrication process. Sensors and Actuators A 83: 124-129
27. Rehder J et al. (2001) Magnetic flux generator for balanced membrane Loudspeaker. Proc 11th international conference on solid-state sensors and actuators, and Eurosensors XV, Transducers '01, Munich, Germany, June 10-14, pp 11,610-11,613
28. Rogge B et al. (1995) Fully batch fabricated magnetic microactuator using a two layer LIGA process. Proc 8th international conference on solid-state sensors and actuators and Eurosensors IX, Transducers '95, Stockholm, June 25-29, pp 320-323
29. Rothuizen H et al. (2002) Compact copper/epoxy-based electromagnetic scanner for scanning probe applications. The 15th IEEE international conference on micro electro mechanical systems, MEMS 2002, Las Vegas, Nevada, USA, January 20-24, pp 582-585
30. Sadler DJ et al. (2000) A universal electromagnetic microactuator using magnetic interconnection concepts. J Microelectromech Syst 9: 460-468
31. Seidemann V et al. (1999) An optimized multilayer fabrication process for high aspect ratio electromagnetic devices and micro systems (MEMS). Proc 10th international conference on solid-state sensors and actuators, Transducers '99, Sendai, vol 1, pp 102-105
32. Seidemann V; Büttgenbach S (2001) Novel fabrication process for 3D meander-shaped microcoils in SU-8 dielectric and their application to linear micromotors. Proc of SPIE-MEMS design, fabrication, characterization, and packaging, vol. 4407, Edinburgh, UK, pp 304-309
33. Seidemann V et al. (2001) Application and investigation of inplane compliant SU8-structures for MEMS. 11th int conf on solid-state sensors and actuators (Transducers '01), vol. 2, München, pp. 1616-1619
34. Seidemann V; Büttgenbach S (2002) Fabrication technology for closely coupled micro coils with integrated flux guidance and their application to proximity and magnetoelastic force sensors. Proc IEEE Sensors Conference, Orlando, June 11-14, pp 580-584
35. Seidemann V et al. (2003) Linear variable reluctance (VR) micro motor with horizontal flux guidance. Concept, simulation, fabrication and test. Proc 12th international conference on solid-state sensors, actuators and microsystems, Transducers '03, Boston, MA, USA, June 8-12, (accepted for publication)
36. Taylor WP; Allen MG (1997) Integrated magnetic microrelays: normally open, normally closed, and multi-pole devices. Proc int conference on solid-state sensors and actuators, Transducers '97, Chicago, USA, June 16-19, pp. 1149-1152
37. Thorpe J et al. (1998) High frequency transmission line using micromachined polymer dielectric. Electronic Lett 34: 1237-1238
38. Tilmans HAC et al. (1999) A fully-packaged electromagnetic microrelay. Proc 12th IEEE international conference on micro electro mechanical systems, MEMS 99, Orlando, USA, pp 25-30