Universal electromagnetic microactuator using magnetic interconnection concepts

Journal of Microelectromechanical Systems

Volumn 9, Issue 4, 2000, Pages 460-468

  Sadler, Daniel J ^a,c   Liakopoulos, Trifon M ^a,b,c,d   Ahn, Chong H ^{a,e,f,g,h,i,j}  

^a University of Cincinnati   (United States)

^b LUCENT TECHNOLOGIES   (United States)

^c UNIVERSITY OF CINCINNATI   (United States)

^d UNIVERSITY OF IOANNINA   (Greece)

^e Inha University   (South Korea)

^f Seoul National University   (South Korea)

^g GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^h IBM T J WATSON RESEARCH CENTER   (United States)

ⁱ Ctr Microlectron Sensors and MEMS   (United States)

^j ELECTROCHEMICAL SOCIETY

more..

Author keywords

[No Author keywords available]

Indexed keywords

FLUX GENERATOR; MAGNETIC INTERCONNECTION CONCEPTS; MICROFABRICATION; PHOTORESIST LITHOGRAPHY; UNIVERSAL ELECTROMAGNETIC MICROACTUATORS;

ELECTRIC INDUCTORS; ELECTRIC WINDINGS; ELECTROMAGNETIC WAVES; MAGNETIC CORES; MICROELECTROMECHANICAL DEVICES; NICKEL ALLOYS; PHOTOLITHOGRAPHY; SEMICONDUCTOR DEVICE MANUFACTURE;

MICROACTUATORS;

EID: 0034469618     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.896766     Document Type: Article

References (27)

1. C. H. Ahn and M. G. Allen, "A fully integrated surface micromachined magnetic microactuator with a multilevel meander magnetic core," J. Microelectromech. Syst., vol. 2, pp. 15-22, 1993.
2. F. Cardot, J. Gobet, M. Bogdanski, and F. Rudolf, "Fabrication of a magnetic transducer composed of a high-density array of microelectromagnets with on-chip electronics," Sens. Actuators, vol. A-43, pp. 11-16, 1994.
3. T. R. Christenson, J. Klein, and H. Guckel, "An electromagnetic micro dynamometer," in Proc. 1995 IEEE MEMS Conf., Amsterdam, The Netherlands, 1995, pp. 386-391.
4. J. A. Wright, Y. C. Tai, and S. C Chang, "A large-force, fully-integrated MEMS magnetic actuator," in Proc. Transducers '97, Chicago, IL. 1997, pp. 793-796.
5. J. A. Wright and Y. C. Tai, "Micro-miniature electromagnetic switches fabricated using MEMS technology," in Proc. 46th Ann. Int. Relay Conf. NARM 98, Oak Brook, IL, 1998, pp. 13-1-13-4.
6. W. P. Taylor, O. Brand, and M. G. Allen, "Fully integrated magnetically actuated micromachined relays," J. Microelectromech. Syst., vol. 7, pp. 181-191, 1998.
7. E. Fullin, J. Gobet, H. Tilmans, and J. Bergqvist, "A new basic technology for magnetic micro-actuators," in Proc. 1998 IEEE MEMS Conf., Heidelberg, Germany, 1998, pp. 143-147.
8. D. J. Sadler, T. M. Liakopoulos, and C. H Ahn, "A new micromachined electromagnet with electroplated Ni/Fe permalloy through-holes," in Proc. Electrochemical Society: 5th Int. Symp. Magnetic Materials, Processes, and Devices, Boston, MA, 1998, pp. 377-388.
9. B. Wagner, M. Kreutzer, and W. Benecke, "Permanent magnet micromotors on silicon substrates." J. Microelectromech. Syst., vol. 2, pp. 23-29, 1993.
10. T. M. Liakopoulos, W. Zhang, and C. H. Ahn, "Electroplated thick CoN-iMnP permanent magnet arrays for micromachined magnetic device applications," in Proc. 1996 IEEE MEMS Conf., San Diego, CA, 1996, pp. 79-84.
11. Y. Shinozawa, T. Abe, and T. Kondo, "A proportional microvalve using a bi-stable magnetic actuator," in Proc. 1997 IEEE MEMS Conf., Nagoya, Japan. 1997, pp. 233-237.
12. L. K. Lagorce, O. Brand, and M. G. Allen, "Magnetic microactuators based on polymer magnets," J. Microelectromech. Syst., vol. 8, pp. 2-9, 1999.
13. C. Liu, T. Tsao, and Y. C. Tai, "Out of plane permalloy magnetic actuators for delta-wing control," in Proc. 1995 IEEE MEMS Conf., Amsterdam. The Netherlands, 1995, pp. 7-12.
14. J. W. Judy, R. S. Muller, and H. H. Zappe, "Magnetic microactuation of polysilicon flexure structures," J. Microelectromech. Syst., vol. 4, no. 4, pp. 162-169, 1995.
15. Y. W. Yi and C. Liu, "Magnetic actuation of hinged microstructures," J. Microelectromech. Syst., vol. 8, pp. 10-17, 1999.
16. T. M. Liakopoulos and C. H. Ahn, "Microfabricated toroidal-type planar inductors for MEMS and power electronic applications," in Proc. Electrochemical Society: 5th Int. Symp. Magnetic Materials, Processes, and Devices, Boston, MA. 1998,. pp. 402-412.
17. K. Yamaguchi, E. Sugawara, and O. Nakajima, "Load characteristics of a spiral coil type thin film microtransformer," IEEE Trans. Magn., vol. 29, pp. 3207-3209, 1993.
18. J. A. Von Arx and K. Najafi, "On-chip coils with integrated cores for remote inductive powering of integrated microsystems," in Proc. Transducers '97, Chicago, IL, 1997, pp. 999-1002.
19. O. Oshiro, H. Tsujimoto, and K. Shirae, "A novel miniature planar inductor," IEEE Trans. Magn., vol. 23, pp. 3759-3761, 1987.
20. S. Kawahito, Y. Sasaki, M. Ashiki, and T. Nakamura, "Micromachined solenoids for highly sensitive magnetic sensors," in Proc. Transducers '91, San Francisco, CA, 1991, pp. 1077-1080.
21. M. Yamaguchi, M. Matsumoto, H. Ohzeki, and K. I. Arai, "Fabrication and basic characteristics of dry-etched microinductors," IEEE Trans. Magn., vol. 26, pp. 2014-2016, 1990.
22. C. H Ahn and M. G. Allen, "Micromachined planar inductors on silicon wafers for MEMS applications," IEEE Trans. Ind. Electron., vol. 45, pp. 866-876, June 1998.
23. J. Y. Park and M. Allen, "High current integrated microinductors and microtransformers using low temperature fabrication processes," Microelectron. Int., vol. 14, no. 3, pp. 8-11, 1997.
24. B. Eyre and K. Pister, "Micromechanical resonant magnetic sensor in standard CMOS," in Proc. Transducers '97, Chicago, IL, 1997, pp. 405-408.
25. T. M. Liakopoulos, M. Xu, and C. H. Ahn, "A micro fluxgale magnetic sensor using micromachined 3-dimensional planar coils," in Proc. Solid-State Sensor and Actuator Workshop, Hilton Head, SC, 1998, pp. 19-22.
26. Z. Narni, C. H. Ahn, and M. G. Allen, "An energy-based design criterion for magnetic microactuators," J. Micromech. Microeng. vol. 6, no. 3, pp. 337-344, 1996.
27. D. J. Sadler, K. W. Oh, C. H. Ahn, S. Bhansali, and H. T. Henderson, "A new magnetically actuated microvalve for liquid and gas control applications," in Proc. Transducers '99, Sendai, Japan, 1999, pp. 1812-1815.