A novel fabrication process for 3D meander shaped micro coils in SU8 dielectric and their application to linear micro motors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4407, Issue , 2001, Pages 304-309

  Seidemann, V ^a   Buttgenbach S ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

AZ4562; Magnetic actuation; Micro coils; Micro motors; Planarization; SU8; UV depth lithography; Variable reluctance; Via interconnects

Indexed keywords

DIELECTRIC MATERIALS; ELECTROPLATING; LINEAR MOTORS; LITHOGRAPHY; PHOTORESISTS; ULTRAVIOLET RADIATION;

VARIABLE RELUCTANCE MICRO MOTORS;

ELECTRIC COILS;

EID: 0034845322     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.425315     Document Type: Conference Paper

References (10)

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