New basic technology for magnetic micro-actuators

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 143-147

  Fullin, E ^a   Gobet, J ^a   Tilmans, H A C ^a   Bergqvist, J ^a  

^a CSEM   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; ELECTRIC COILS; ELECTRIC CONTACTORS; ELECTRIC CURRENTS; ELECTRIC RELAYS; ELECTRIC RESISTANCE; ELECTROMAGNETS; FERROMAGNETIC MATERIALS; GOLD; MICROELECTRONICS; NICKEL ALLOYS; SUBSTRATES;

ELECTROMAGNETIC MICROACTUATORS; ELECTROMAGNETIC MICRORELAYS;

ACTUATORS;

EID: 0031651043     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)