Novel electrostatic servo capacitive vacuum sensor

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1457-1460

  Wang, Yuelin ^a   Esashi, M ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; ELECTRODES; GETTERS; MICROMACHINING; PRESSURE; SERVOMECHANISMS; VACUUM APPLICATIONS;

ANODIC BONDING; ELECTROSTATIC SERVO CAPACITIVE VACUUM SENSOR;

SENSORS;

EID: 0030700063     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)