Ambient temperature effect in thin film vacuum sensor

Vacuum

Volumn 68, Issue 4, 2002, Pages 303-309

  Berlicki, T M ^a   Urbanski K J ^a  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY DISSIPATION; PRESSURE EFFECTS; RESISTORS; SENSORS; THERMAL EFFECTS; THERMOCOUPLES; VACUUM TECHNOLOGY;

VACUUM SENSORS;

THIN FILM DEVICES;

EID: 0037073638     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00462-1     Document Type: Article

References (11)

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