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Volumn 46, Issue 4, 2002, Pages 467-476

Surface passivation of AlGaN/GaN HEMTs using MBE-grown MgO or Sc2O3

Author keywords

AlGaN GaN HEMTs; dc and rf characterizations; Hydrogen free dielectrics; MgO; Sc2O3; Surface passivation

Indexed keywords

CRYSTAL GROWTH; DIELECTRIC MATERIALS; GALLIUM NITRIDE; LEAKAGE CURRENTS; MAGNESIA; MOLECULAR BEAM EPITAXY; PASSIVATION; SEMICONDUCTING ALUMINUM COMPOUNDS; THRESHOLD VOLTAGE; TRANSCONDUCTANCE;

EID: 18244389724     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(01)00314-8     Document Type: Article
Times cited : (45)

References (15)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.