Nanoindentation of a 10 nm thick thin film

Journal of Materials Research

Volumn 14, Issue 6, 1999, Pages 2228-2232

  Sawa, Takeshi ^a   Akiyama, Yasushi ^a,b   Shimamoto, Atsushi ^a,c   Tanaka, Kohichi ^a  

^a NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

^b Nippon Seiki Co Ltd   (Japan)

^c Nano TEM Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMOND FILMS; ELASTIC MODULI; FINITE ELEMENT METHOD; MECHANICAL PROPERTIES; SURFACE TESTING;

DIAMONDLIKE CARBON FILM; NANOINDENTATION; NANOMETER; THICK THIN FILM; TRIANGULAR INDENTER;

THIN FILMS;

EID: 0032676354     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1999.0299     Document Type: Article

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