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Thin Solid Films

Volumn 296, Issue 1-2, 1997, Pages 177-180

Texture and stress profile in thick polysilicon films suitable for fabrication of microstructures

(5) Furtsch, M a Offenberg, M a Vila, A b Cornet, A b Morante, J R b

a ROBERT BOSCH GMBH (Germany)

b UNIVERSITY OF BARCELONA (Spain)

Author keywords

Polysilicon; Stress; TEM; Texture; X ray diffraction; Raman

Indexed keywords

ANNEALING; DOPING (ADDITIVES); EPITAXIAL GROWTH; FILM GROWTH; MORPHOLOGY; PHOSPHORUS; STRESS ANALYSIS; TEXTURES; THERMAL STRESS; THICK FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY CRYSTALLOGRAPHY;

MICRO RAMAN SPECTROSCOPY; MICROSTRUCTURES;

SILICON;

EID: 0031100301 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(96)09341-8 Document Type: Article

Times cited : (15)

References (9)

1
- 0000776212
- T.I. Kamins, Sensors and Actuators, A21-A23 (1990) 817.
- (1990) Sensors and Actuators , vol.A21-A23 , pp. 817
- Kamins, T.I.¹

2
- 0028465142
- V.P. Lesnikova, A.S. Turtsevich, V.Y. Krasnitsky, V.A. Emelyanov, O.Y. Nalivaiko, S.V. Kravtsov and T.V. Makarevich, Thin Solid Films, 247 (1994) 156.
- (1994) Thin Solid Films , vol.247 , pp. 156
- Lesnikova, V.P.¹ Turtsevich, A.S.² Krasnitsky, V.Y.³ Emelyanov, V.A.⁴ Nalivaiko, O.Y.⁵ Kravtsov, S.V.⁶ Makarevich, T.V.⁷

3
- 0027676875
- E. Ibok and S. Garg, J. Electrochem. Soc., 140 (10) (1993) 2927.
- (1993) J. Electrochem. Soc. , vol.140 , Issue.10 , pp. 2927
- Ibok, E.¹ Garg, S.²

4
- 0039299108
- Transducers '95-eurosensors IX: 148-C4
- M. Offenberg, F. Lärmer, B. Elsner, H. Münzel and W. Riethmüller, Transducers '95-Eurosensors IX: 148-C4, Digest of technical papers, Vol. 1, p. 589-592.
- Digest of Technical Papers , vol.1 , pp. 589-592
- Offenberg, M.¹ Lärmer, F.² Elsner, B.³ Münzel, H.⁴ Riethmüller, W.⁵

5
- 0040484203
- Transducers' 95-eurosensors IX: 519
- K. Funk, A. Schilp, M. Offenberg, B. Elsner and F. Lärmer, Transducers' 95-Eurosensors IX: 519, Late news contributions, p, 50-52.
- Late News Contributions , pp. 50-52
- Funk, K.¹ Schilp, A.² Offenberg, M.³ Elsner, B.⁴ Lärmer, F.⁵

6
- 0038386523
- Transducers '95-eurosensors IX: 43-A5
- P. Lange, M. Kirsten, W. Riethmüller, B. Wenk, G. Zwicker, J.R. Morante, F. Ericson and J.Å. Schweitz, Transducers '95-Eurosensors IX: 43-A5, Sensors and Actuators, A54, 1996, p. 674-678.
- (1996) Sensors and Actuators , vol.A54 , pp. 674-678
- Lange, P.¹ Kirsten, M.² Riethmüller, W.³ Wenk, B.⁴ Zwicker, G.⁵ Morante, J.R.⁶ Ericson, F.⁷ Schweitz, J.Å.⁸

7
- 0039891259
- SAE technical paper series 960758
- in press
- M. Offenberg, H. Münzel, D. Schubert, O. Schatz, F. Lärmer, E. Müller, B. Maihöfer and J. Marek, SAE Technical Paper Series 960758, Sensors and Actuators (1996) in press.
- (1996) Sensors and Actuators
- Offenberg, M.¹ Münzel, H.² Schubert, D.³ Schatz, O.⁴ Lärmer, F.⁵ Müller, E.⁶ Maihöfer, B.⁷ Marek, J.⁸

8
- 0029323719
- M.S. Benrakkad, M.A. Benitez, J. Esteve, L.M. Lopez-Villegas, J. Samitier and J.R. Morante, J. Micromech. Microeng., 5 (1995) 132.
- (1995) J. Micromech. Microeng. , vol.5 , pp. 132
- Benrakkad, M.S.¹ Benitez, M.A.² Esteve, J.³ Lopez-Villegas, L.M.⁴ Samitier, J.⁵ Morante, J.R.⁶

9
- 36449003802
- D. Rats, L. Bimbault, L. Vandenbulcke, R. Herbin and K.F. Badawi, J. Appl. Phys., 78 (8) (1995) 4994.
- (1995) J. Appl. Phys. , vol.78 , Issue.8 , pp. 4994
- Rats, D.¹ Bimbault, L.² Vandenbulcke, L.³ Herbin, R.⁴ Badawi, K.F.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.