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Volumn 241-243, Issue , 1997, Pages 1138-1141
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Effect of irradiation ion species on internal stress in boron thin films
a
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Author keywords
[No Author keywords available]
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Indexed keywords
DEPOSITION;
EVAPORATION;
HELIUM;
HYDROGEN;
ION BOMBARDMENT;
IONS;
MORPHOLOGY;
POROUS MATERIALS;
SPUTTERING;
STRESS ANALYSIS;
THIN FILMS;
VACUUM APPLICATIONS;
COMPRESSIVE STRESSES;
ION PEENING EFFECT;
BORON;
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EID: 0031546509
PISSN: 00223115
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-3115(96)00687-3 Document Type: Article |
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Times cited : (8)
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References (8)
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