Analysis of intrinsic stress distribution in grains of high quality CVD diamond film by micro-Raman spectroscopy

Thin Solid Films

Volumn 308-309, Issue 1-4, 1997, Pages 168-172

  Vlasov, I I ^a   Ralchenko, V G ^a   Obraztsova, E D ^a   Smolin, A A ^a   Konov, V I ^a  

^a PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

Author keywords

CVD diamond films; Micro raman spectroscopy; Stress distribution

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL ORIENTATION; RAMAN SPECTROSCOPY; STRESS CONCENTRATION;

MICROWAVE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

DIAMOND FILMS;

EID: 0031251015     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00427-6     Document Type: Article

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