Damage to solid-state photodiodes by vacuum ultraviolet radiation

Journal of Electron Spectroscopy and Related Phenomena

Volumn 144-147, Issue , 2005, Pages 1039-1042

  Arp, Uwe ^a   Shaw, Ping Shine ^a   Gupta, Rajeev ^a   Lykke, Keith R ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Detector standards; Excimer laser; Interface trap states; Photo lithography; Radiation damage; Radiometry; Synchrotron radiation; UV detector

Indexed keywords

ELECTRONIC STRUCTURE; EXCIMER LASERS; INTERFACES (MATERIALS); PHOTOLITHOGRAPHY; PHOTONS; RADIATION DAMAGE; SYNCHROTRON RADIATION; ULTRAVIOLET DETECTORS; ULTRAVIOLET RADIATION; VACUUM;

DETECTOR STANDARDS; INTERFACE TRAP STATES; PASSIVATING LAYERS; WAVELENGTHS;

PHOTODIODES;

EID: 17444408535     PISSN: 03682048     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.elspec.2005.01.236     Document Type: Conference Paper

References (31)

1. G.D. Wilk, R.M. Wallace, and J.M. Anthony J. Appl. Phys. 89 10 2001 5243 5275
2. R.B. Laughlin Phys. Rev. B 22 6 1980 3021 3029
3. L.R. Canfield, R.E. Vest, R. Korde, H. Schmidtke, and R. Desor Metrologia 35 4 1998 329 334
4. P. Kuschnerus, H. Rabus, M. Richter, F. Scholze, L. Werner, and G. Ulm Metrologia 35 4 1998 355 362
5. L. Werner Metrologia 35 4 1998 407 411
6. P.-S. Shaw, K.R. Lykke, R. Gupta, T.R. O'Brian, U. Arp, H.H. White, T.B. Lucatorto, J.L. Dehmer, and A.C. Parr Appl. Opt. 38 1 1999 18 28
7. R. Gupta, K. Lykke, P.S. Shaw, J.L. Dehmer, in: G.R. Carruthers, K.F. Dymond (Eds.), Ultraviolet Atmospheric and Space Remote Sensing: Methods and Instrumentation II, vol. 3818, SPIE, Bellingham, WA, 1999, pp. 27-33.
8. P.-S. Shaw, T.C. Larason, R. Gupta, and K.R. Lykke Rev. Sci. Inst. 73 3 2002 1625 1628
9. M. Richter, U. Kroth, A. Gottwald, C. Gerth, K. Tiedtke, T. Saito, I. Tassy, and K. Vogler Appl. Opt. 41 34 2002 7167 7172
10. R. Korde, C. Prince, D. Cunningham, R.E. Vest, and E. Gullikson Metrologia 40 1 2003 S145 S149
11. F. Scholze, R. Klein, and T. Bock Appl. Opt. 2003 5621 5626
12. P.-S. Shaw, R. Gupta, K.R. Lykke, Appl. Opt. 44 (2) (2005) 197-207.
13. U. Arp, R. Friedman, M.L. Furst, S. Makar, and P.-S. Shaw Metrologia 37 5 2000 357 360
14. L.R. Canfield, J. Kerner, and R. Korde Appl. Opt. 28 18 1989 3940 3943
15. F.R. McFeely, E. Cartier, J.A. Yarmoff, and S.A. Joyce Phys. Rev. B 42 8 1990 5191 5200
16. P.M. Lenahan, and P.V. Dressendorfer J. Appl. Phys. 55 10 1984 3495 3499
17. K.L. Brower Phys. Rev. B 38 11 1988 9657 9666
18. K.L. Brower Phys. Rev. B 38 14 1988 9657 9666
19. K.G. Druijf, J.M.M. de Nijs, E.V.D. Drift, E.H.A. Granneman, and P. Balk Appl. Phys. Lett. 65 3 1994 347 349
20. V. Zereriya, and T.P. Ma Appl. Phys. Lett. 43 1 1983 95 97
21. S.K. Lai J. Appl. Phys. 54 5 1983 2540 2546
22. P.J. Caplan, E.H. Poindexter, and S.R. Morrison J. Appl. Phys. 53 1 1982 541 545
23. J. Robertson J. Vac. Sci. Technol. B 18 3 2000 1785 1791
24. G. Lucovsky, H. Yang, and H.Z. Massoud J. Vac. Sci. Technol. B 16 4 1998 2191 2198
25. H. Uchida, and T. Ajioka Appl. Phys. Lett. 51 6 1987 433 435
26. D.A. Buchanan, A.D. Marwick, D.J. DiMaria, and L. Dori J. Appl. Phys. 76 6 1994 3595 3608
27. J.G. Mihaychuk, N. Shamir, and H.M. van Driel Phys. Rev. B 59 3 1999 2164 2173
28. R. Williams Phys. Rev. 140 2A 1965 A569 A575
29. A.M. Goodman Phys. Rev. 152 2 1966 780 784
30. R.E. Mikawa, and P.M. Lenahan J. Appl. Phys. 59 6 1986 2054 2059
31. T. Ohmameuda, H. Miki, K. Asada, T. Sugano, and Y. Ohji J. Appl. Phys. 30 12A 1991 L1993 L1995