Mosfet scaling trends and challenges through the end of the roadmap

Proceedings of the Custom Integrated Circuits Conference

Volumn , Issue , 2004, Pages 233-240

  Zeitzoff, Peter M ^a  

^a SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GATE DIELECTRICS; METAL GATE ELECTRODES; MOSFET SCALING; WAFER SIZE;

CMOS INTEGRATED CIRCUITS; DIELECTRIC MATERIALS; ELECTRODES; GATES (TRANSISTOR); LEAKAGE CURRENTS; MICROPROCESSOR CHIPS; POLYSILICON; SILICON WAFERS;

MOSFET DEVICES;

EID: 17044424879     PISSN: 08865930     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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