Atomic level control of sige epitaxy and doping

Proceedings - Electrochemical Society

Volumn 7, Issue , 2004, Pages 803-813

  Tillack, Bernd ^a   Yamamoto, Yuji ^a   Murota, Junichi ^b  

^a IHP   (Germany)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DOPING (ADDITIVES); EPITAXIAL GROWTH; MOSFET DEVICES; PHOTOEMISSION; SEMICONDUCTOR QUANTUM DOTS; SURFACE REACTIONS; TELECOMMUNICATION; THERMAL EFFECTS; TRANSISTORS;

ATOMIC LEVEL CONTROL; DEVICE ARCHITECTURES; MOLECULAR LAYERS; MOORE'S LAW;

SILICON COMPOUNDS;

EID: 17044411771     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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