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Thin Solid Films

Volumn 318, Issue 1-2, 1998, Pages 1-5

Atomic control of doping during SiGe epitaxy

(1) Tillack, B a

a IHP (Germany)

Author keywords

Atomic layer doping; LP(RT)CVD; SiGe epitaxy

Indexed keywords

ACTIVATION ENERGY; ADSORPTION; CHEMICAL VAPOR DEPOSITION; DESORPTION; DISSOCIATION; EPITAXIAL GROWTH; MONOLAYERS; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON COMPOUNDS; THERMAL EFFECTS;

ATOMIC LAYER DOPING;

SEMICONDUCTOR DOPING;

EID: 0032046535 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)01127-9 Document Type: Article

Times cited : (44)

References (14)

1
- 0022062138
- J. Nishizawa, H. Abe, T. Kurabayashi, J. Electrochem. Soc. 132 (1985) 1197.
- (1985) J. Electrochem. Soc. , vol.132 , pp. 1197
- Nishizawa, J.¹ Abe, H.² Kurabayashi, T.³

2
- 0024683641
- Y. Takahashi, H. Ishii, K. Fujinaga, J. Electrochem. Soc. 136 (1989) 1826.
- (1989) J. Electrochem. Soc. , vol.136 , pp. 1826
- Takahashi, Y.¹ Ishii, H.² Fujinaga, K.³

3
- 0001085997
- M. Leskelä, M. Ritala, J. Physique IV C5 (1995) 937.
- (1995) J. Physique IV , vol.C5 , pp. 937
- Leskelä, M.¹ Ritala, M.²

4
- 0000702297
- J. Murota, M. Sakuraba, S. Ono, Appl. Phys. Lett. 62 (1993) 2353.
- (1993) Appl. Phys. Lett. , vol.62 , pp. 2353
- Murota, J.¹ Sakuraba, M.² Ono, S.³

5
- 0342708867
- J. Murota, M. Sakuraba, T. Watanabe, T. Matsuura, Y. Sawada, J. Physique IV C5 (1995) 1101.
- (1995) J. Physique IV , vol.C5 , pp. 1101
- Murota, J.¹ Sakuraba, M.² Watanabe, T.³ Matsuura, T.⁴ Sawada, Y.⁵

6
- 0001745588
- T. Matsuura, J. Murota, Y. Sawada, T. Ohmi, Appl. Phys. Lett. 63 (1993) 2803.
- (1993) Appl. Phys. Lett. , vol.63 , pp. 2803
- Matsuura, T.¹ Murota, J.² Sawada, Y.³ Ohmi, T.⁴

7
- 0031069220
- B. Tillack, D. Krüger, P. Gaworzewski, G. Ritter, Thin Solid Films 294 (1997) 15.
- (1997) Thin Solid Films , vol.294 , pp. 15
- Tillack, B.¹ Krüger, D.² Gaworzewski, P.³ Ritter, G.⁴

8
- 84955019722
- M. Liehr, C.M. Greenlief, M. Offenberg, S.R. Kasi, J. Vac. Sci. Technol. A 8 (1990) 2960.
- (1990) J. Vac. Sci. Technol. A , vol.8 , pp. 2960
- Liehr, M.¹ Greenlief, C.M.² Offenberg, M.³ Kasi, S.R.⁴

9
- 36549097443
- M.L. Yu, D.J. Vitkavage, B.S. Meyerson, J. Appl. Phys. 59 (1986) 4032.
- (1986) J. Appl. Phys. , vol.59 , pp. 4032
- Yu, M.L.¹ Vitkavage, D.J.² Meyerson, B.S.³

10
- 0000733907
- B. Tillack, P. Zaumseil, G. Morgenstern, P. Krüger, G. Ritter, Appl. Phys. Lett. 67 (1995) 1143.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 1143
- Tillack, B.¹ Zaumseil, P.² Morgenstern, G.³ Krüger, P.⁴ Ritter, G.⁵

11
- 0030396881
- G. Ritter, B. Tillack, D. Wolansky, Mater. Res. Soc. Symp. Proc. 429 (1996) 379.
- (1996) Mater. Res. Soc. Symp. Proc. , vol.429 , pp. 379
- Ritter, G.¹ Tillack, B.² Wolansky, D.³

12
- 0346083364
- J.C. Bailar et al. (Eds.), Pergamon Oxford
- N.N. Greenwood, in: J.C. Bailar et al. (Eds.), Comprehensive inorganic chemistry, Vol. 1, Pergamon Oxford, 770, 1973.
- (1973) Comprehensive Inorganic Chemistry , vol.1 , pp. 770
- Greenwood, N.N.¹

13
- 0010540430
- B. Tillack, J. Schlote, G. Ritter, D. Krüger, G. Morgenstern, P. Gaworzewski, J. Physique IV C5 (1995) 1117.
- (1995) J. Physique IV , vol.C5 , pp. 1117
- Tillack, B.¹ Schlote, J.² Ritter, G.³ Krüger, D.⁴ Morgenstern, G.⁵ Gaworzewski, P.⁶

14
- 0030648116
- R. Banisch, B. Tillack, M. Pierschel, K. Pressel, R. Barth, D. Krüger, G. Ritter, Mater. Res. Soc. Symp. 450 (1997) 213.
- (1997) Mater. Res. Soc. Symp. , vol.450 , pp. 213
- Banisch, R.¹ Tillack, B.² Pierschel, M.³ Pressel, K.⁴ Barth, R.⁵ Krüger, D.⁶ Ritter, G.⁷

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