Atomic-layer surface reaction of SiH4 on Ge(100)

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 6 SUPPL. B, 1997, Pages 4042-4045

  Watanabe, Takeshi ^a   Sakuraba, Masao ^a   Matsuura, Takashi ^a   Murota, Junichi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Dimer structure; Hydride; Single atomic layer

Indexed keywords

EID: 0010333779     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.4042     Document Type: Article

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