Microstructural study of Pt contact on p-type GaN

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 1 SPEC., 2003, Pages 87-90

  Kim, Jong Kyu ^a   Jang, Ho Won ^a   Kim, Chong Cook ^a   Je, Jung Ho ^a   Rickert, Kimberly A ^b   Kuech, Thomas F ^b   Lee, Jong Lam ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

^b University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COMPRESSIVE STRENGTH; CRYSTAL MICROSTRUCTURE; ELECTRIC CONDUCTIVITY MEASUREMENT; FERMI LEVEL; FERMI SURFACE; INTERFACES (MATERIALS); OHMIC CONTACTS; PLATINUM; SYNCHROTRON RADIATION; TENSILE STRESS; X RAY SCATTERING;

BIAXIAL STRAIN; CONTACT RESISTIVITY; SYNCHROTRON X RAY SCATTERING;

GALLIUM NITRIDE;

EID: 0037207683     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1532733     Document Type: Article

References (13)

1. S. Nakamura, M. Senoh, S. Nagahama, N. Iwasa, T. Yamada, T. Matsushita, H. Kiyoku, and T. Mukai, Appl. Phys. Lett. 76, 22 (2000).
2. S. J. Pearton, J. C. Zolper, R. J. Shul, and F. Ren, J. Appl. Phys. 86, 1 (1999).
3. T. Arai, H. Sueyoshi, Y. Koide, M. Moriyama, and M. Murakami, J. Appl. Phys. 89, 2826 (2001).
4. J.-L. Lee, J. K. Kim, J. W. Lee, Y. J. Park, and T. Kim, Electrochem. Solid-State Lett. 3, 53 (2000).
5. C. Huh, H.-S. Kim, S.-W. Kim, J.-M. Lee, D.-J. Kim, I.-H. Lee, and S.-J. Park, J. Appl. Phys. 87, 4464 (2000).
6. O. Katz, V. Garber, B. Meyler, G. Bahir, and J. Salzman, Appl. Phys. Lett. 79, 1417 (2001).
7. U. Tanaka, T. Maruyama, and K. Akimoto, J. Cryst. Growth 202, 444 (1999).
8. C. C. Kim, W. H. Kim, J. H. Je, D.-W. Kim, H. K. Baik, and S.-M. Lee, Electrochem. Solid-State Lett. 3, 335 (2000).
9. B. Jogai, Phys. Rev. B 57, 2382 (1998).
10. J. K. Kim, J.-L. Lee, J. W. Lee, H. E. Shin, Y. J. Park, and T. Kim, Appl. Phys. Lett. 73, 2953 (1998).
11. N. Grandjean, J. Massies, P. Vennegues, M. Laugt, and M. Leroux, Appl. Phys. Lett. 70, 643 (1997).
12. J. F. Moulder, W. F. Stickle, P. E. Sobol, and K. D. Bomben, Handbook of X-ray Photoelectron Spectroscopy (Perkin-Elmer Corp., Eden Prairie, MN, 1992).
13. J. Sun, K. A. Rickert, J. M. Redwing, A. B. Ellis, F. J. Kimpsel, and R. F. Kuech, Appl. Phys. Lett. 76, 415 (2000).