Integrated microelectromechanical gyroscopes

Journal of Aerospace Engineering

Volumn 16, Issue 2, 2003, Pages 65-75

  Xie, Huikai ^a   Fedder, Gary K ^b  

^a University of Florida   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Design; Electronic equipment; Fabrication; Micromechanics; Sensors

Indexed keywords

DIGITAL ELECTRONICS; MICROELECTROMECHANICAL GYROSCOPES; SURFACE-MICROMACHINING GYROSCOPES; WIDE-RANGING APPLICATIONS;

CMOS INTEGRATED CIRCUITS; COMPOSITE MICROMECHANICS; CONSUMER ELECTRONICS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SENSORS; TUNING; WIRELESS TELECOMMUNICATION SYSTEMS;

GYROSCOPES;

EID: 13944279234     PISSN: 08931321     EISSN: None     Source Type: Journal    
DOI: 10.1061/(ASCE)0893-1321(2003)16:2(65)     Document Type: Article

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