Phase and Vibration Analysis for a CMOS-MEMS Gyroscope

International Journal of Nonlinear Sciences and Numerical Simulation

Volumn 3, Issue 3-4, 2002, Pages 319-324

  Xie, Huikai ^a,c   Fedder, Gary K ^a   Pan, Zhiyu ^b   Frey, Wilhelm ^b  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b BOSCH RESEARCH AND TECHNOLOGY CENTER   (United States)

^c University of Florida   (United States)

Author keywords

CMOS MEMS; Gyroscope; Motion coupling; Phase; Quadrature

Indexed keywords

EID: 0036328766     PISSN: 15651339     EISSN: None     Source Type: Journal    
DOI: 10.1515/IJNSNS.2002.3.3-4.319     Document Type: Article

References (8)

1. P. Greiff, B. Boxenhorn, T. King, L. Niles, "Silicon monolithic micromechanical gyroscope", Transducers '91, San Francisco, CA, p.966-968.
2. M.W. Putty, K. Najafi, "A micromachined vibrating ring gyroscope," Tech. Digest. Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, 13-16 June 1994, p.213-220.
3. W.A. Clark, R.T. Howe, R. Horowitz, "Surface micromachined Z-axis vibratory rate gyroscope", Tech. Digest. Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA; 3-6 June 1996, p.283-287.
4. M. Lutz, et al., "A precision Yaw Rate Sensor in Silicon Micromachining", Transducers '97, Chicago, June 16-19, 1997,p.847-850.
5. J.A. Geen, S.J. Sherman, J.F. Chang and S.R. Lewis, "Single-chip surface-micromachining integrated gyroscope with 50 deg/hour root Allan variance", Tech. Digest. 2002 IEEE International Solid-State Circuits Conference, San Francisco, CA, Feb. 3-7, 2002, pp.426-427.
6. H. Xie, and G.K. Fedder, "A DRIE CMOS-MEMS Gyroscope", to be presented at IEEE Sensors 2002 Conference, June 12-14, 2002, Orlando, Florida.
7. Matlab/Simulink, Version 6.0, The Math Works, Inc., http://www.mathworks. com.
8. H. Xie, L. Erdmann, X. Zhu, K. Gabriel and G. Fedder, "Post-CMOS Processing For High-aspect-ratio Integrated Silicon Microstructures", Journal of Microelectromechanical Systems, 11(2) (2002) 93-101.