Static and dynamic behavior of an electrically excited resonant microbeam

Collection of Technical Papers - AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics and Materials Conference

Volumn 2, Issue , 2002, Pages 822-830

  Younis, Mohammad I ^a   Abdel Rahman, Eihab M ^a   Nayfeh, Ali H ^a  

^a VIRGINIA STATE UNIVERSITY   (United States)

Author keywords

Electrostatic actuation; Microbeam; Mid plane stretching; Resonator dynamics

Indexed keywords

BEAMS AND GIRDERS; CAPACITORS; DEFLECTION (STRUCTURES); ELECTRIC EXCITATION; ELECTRIC LOADS; ELECTRIC POTENTIAL; ELECTROSTATIC ACTUATORS; MATHEMATICAL MODELS; NATURAL FREQUENCIES; POLARIZATION; RESONATORS; STRETCHING; VIBRATIONS (MECHANICAL);

MICROBEAMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036078258     PISSN: 02734508     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2514/6.2002-1305     Document Type: Conference Paper

References (10)

1. Micro resonant force gauges
2. Characteristics of polysilicon resonant microbeams
3. Static and dynamic aspects of an air-gap capacitor
4. Electrostatically driven vacuum-encapsulated polysilicon resonators. Part II: Theory and performance
5. Improved analysis of microbeams under mechanical and electrostatic loads
6. Capacitive microbeam resonator design
7. Stabilization of electrostatically actuated mechanical devices