Stroboscopic interferometry for characterization and improvement of flexural plate-wave transducers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4558, Issue , 2001, Pages 108-116

  Rembe, Christian ^a   Caton, Pamela ^a   White, Richard M ^a   Muller, Richard S ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Flexural plate wave; Laser Doppler vibrometer; MEMS; MEMS characterization; MEMS testing; Stroboscopic interferometer

Indexed keywords

ACOUSTIC WAVES; DEFORMATION; LASER PULSES; MICROELECTROMECHANICAL DEVICES; SILICON; STROBOSCOPES; TRANSDUCERS; VIBRATION MEASUREMENT;

LASER-DOPPLER VIBROMETERS; STROBOSCOPIC INTERFEROMETER SYSTEMS (SMIS);

INTERFEROMETERS;

EID: 0035765833     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.442992     Document Type: Conference Paper

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