Long throw and rotary output electro-thermal actuators based on bent-beam suspensions

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 680-685

  Park, J S ^a   Chu, L L ^a   Siwapornsathain, E ^a   Oliver, A D ^a   Gianchandani, Y B ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BUCKLING; FREQUENCY RESPONSE; MATHEMATICAL MODELS; MECHANICAL DRIVES; ROTATING MACHINERY; SUSPENSIONS (COMPONENTS); THERMAL EXPANSION;

BENT-BEAM MICROACTUATORS;

MICROACTUATORS;

EID: 0033692453     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)